Excel Precision High-Precision 6DOF Laser Interferometer
NIST/ISO compliant laser interferometer (displacement meter) capable of easy and precise measurement of up to 6 axes simultaneously.
In this laser interferometer system, a combination of optical modules allows for simultaneous high-precision measurement of up to 6 degrees of freedom (X, Y, Z, pitch, yaw, roll) from a single axis. The installation and alignment of the system are very simple. Additionally, it is possible to further improve accuracy by correcting the wavelength of the measurement laser using optional environmental sensors and refractometers. With over 5,000 installations, it has become the de facto standard worldwide in fields such as semiconductor manufacturing equipment like wafer and FPD steppers, CNC machines, and displacement measurement in motion systems, as well as research institutions in various countries.
- Company：オーテックス
- Price：Other
